Micro Porous Ceramic
This series of antistatic surface treatments are specially developed for the wafer semiconductor industry to reduce the damage caused by static electricity during wafer manufacturing package testing, such as metal, ceramics, and plastic (excluding Teflon and tantalum rubber). , quartz, etc., the finished product has high anti-static, high anti-wear, high temperature and other characteristics.
Resistance： e*106~9
LONGYI started the development of Porous Ceramic Chuck, Disco dicing chuck, wafer dicing chuck table, wafer dicing stage, and floating stage in 2013. Its main customers are semiconductors, solar energy, and LCD.
For micro porous ceramics, the microstructure is made up of small crystals called grains. In general, the smaller the grain size, the stronger and denser the ceramic material is. The wide variety of applications for micro porous ceramic materials results from their unique properties. In many respects, these properties cannot be achieved by other materials.
Application：
- Vacuum Nozzle
- Vacuum Chuck
- Air Bearing
- Work Holding
- Air floating stage
Properties
LONGYI started the development of Porous Ceramic Chuck, Disco dicing chuck, wafer dicing chuck table, wafer dicing stage and floating stage in 2013. Its main customers are semiconductors, solar energy and LCD.
| Item / No. | A-2000 | B-2000 | C-2000 | D-2000 | |
| Material | Alumina | ||||
| Al2O3 | % | 96 | 92 | 96 | 95 |
| Bulk Specific gravity | g/cm3 | 2.28 | 2.28 | 2.28 | 2.1 |
| Water absorption | % | 0 | 0 | 0 | 0 |
| Porosity | % | 35~40 | 35~40 | 32~40 | 40~50 |
| Pore size | μm | 2~3 | 2~3 | 2~3 | 30~40 |
| Bending Strength | MPa | >60 | >60 | >60 | >40 |
| kgf/cm2 | >6 | >6 | >6 | >4 | |
| Color | White | Black | Brown | Black | |