Ceramic end effectors are made of high-purity alumina or silicon carbide ceramics. These products are also called Ceramic handling, Ceramic claws and Ceramic robot arms. They have high precision and stability. characteristics and are widely used in semiconductor, optoelectronics, and solar energy manufacturing processes. It can be divided into contact type, vacuum type and mapping type.
Contact end effectors are usually supported by direct contact via the weight of the object.
Vacuum-type end effectors use vacuum suction to grab and handle wafers. This design can effectively handle wafers of various shapes and sizes, especially thin or warped wafers, which are not possible with traditional vacuum chucks. Unable to achieve. These vacuum-type actuators are designed with high purity and low metal impurities in mind to avoid contamination of semiconductor materials.
Mapping end effectors are usually equipped with mapping sensors that can accurately locate the position of the wafer to ensure that errors do not occur during handling. This type of actuator is particularly important in automated production lines, as they increase production efficiency and reduce the risk of human error.
What are the advantages of ceramic end effectors?
Contact type
High load capacity: This type of end effector can directly carry larger weights and is suitable for handling heavy objects, improving the efficiency of the overall operation.
Wear and Heat Resistance: These effectors typically have excellent wear and heat resistance, making them suitable for use at high temperatures or in environments where high wear resistance is required.
Vacuum type
Vacuum-type ceramic end effectors are often used to grip and handle sensitive materials such as wafers. The high strength and lightweight properties of ceramic materials allow these devices to provide stable support during operation without causing damage to the wafer. In addition, ceramic silicon carbide helps prevent the impact of static electricity on semiconductor components, which is critical in semiconductor manufacturing.
Mapping
Mapping type ceramic arms focus on precise positioning and handling, especially in automated production lines. Such arms are usually equipped with high-precision sensors and control systems to enable efficient handling and positioning. The low thermal expansion coefficient and high thermal conductivity of ceramic materials allow these arms to maintain stable performance in high-temperature environments.
What are the advantages of using ceramic end effectors over metal materials?
1. Alumina has extremely high hardness and rigidity, which allows them to maintain stable performance under high pressure and high temperature environments. Often used in wafer growth furnace tubes.
2. The corrosion resistance is better than that of metal materials. Ceramic arms are resistant to acid and alkali attack. During etching and thin film deposition processes.
3. Excellent insulation performance, which can effectively prevent metal ions from contaminating semiconductor components.
4. The lightweight characteristics make the robotic arm more flexible during operation and can improve production efficiency.
