Dicing saw table is mainly used for wafer dicing and laser cutting, flatness accuracy 0.008max, apply wafer 6, 8 and 12 inches, lifetime 18 months (use of acidic ionized water).At present, these products are researched and improved by us and our customers and also also develop antistatic products for our customers
Antistatic Dicing saw table Resistance： e10^6~9 Ω
This series of antistatic surface treatments is specially developed for the wafer semiconductor industry to reduce the damage caused by static electricity during wafer manufacturing package testing, such as metal, ceramics, plastic (excluding Teflon and tantalum rubber). , quartz, etc., the finished product has high anti-static, high anti-wear, high temperature and other characteristics.
Category: Vacuum chuck
P/N : FJEB-910001-1/ 11H
Industries: Packing of Semiconductor
Equipment serial no: DFD6461 / 6360/6360A
Application: Dicing Saw/ Dicing Wafer
Material: Micro Porous ceramic + SUS420-J
Grades: AA+
Color: Dark yellow
Tolerance requirements: 0.05mm Flatness: 0.008 mm
Types of equipment: Dicing Packing
Gross weight: 10.0kgw
Net weight: 9.4 kgw
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Chuck table design drawing by LONGYI
Standard Procedure for Flat Accuracy Measurement for Disco chuck table
References
| Type | PN |
| 12 Inch Laser Dicing Saw | FKFS-510000-0 |
| 6 Inch Round Cleaning Chuck Assy | FELS-910011-1 |
| 8 Inch Round Cleaning Chuck Assy | FELS-910012-1 |
| 8 Inch Cleaning Chuck Assy for DFD6000 | FELS-910016-1 |
| 12 Inch Cleaning Chuck Table | FJES-910007-1 |
| 8 Inch Cleaning Chuck Table for DCS1460 | FJES-910008-1 |
| 6 Inch Chuck Table | FELS-910013-1 |
| 8 Inch Chuck Table | FELS-91001501 |
| DAD3220 | FHEB-910013-1 |
| DAD3350 | FHEB-910015-1 (PLS200) |
| DFD636X(220mm with chamfers) | FJEB-910002-0 (PLS203) |
| DFD651 | FJMB-910006-1 |
| 8 inchTSK AWD-200T/DISCO DFD6340 | FJMB-910008-1 TX28798MR |
| DFD6340 Round | FJTB-010002-1 (PRS 203) |
| DFD6340 | FJTB-010003-0(PRS152) |
| DFD6340 Rectangle | FJTB-510005-0 (PRS205X90) |
| DFD63X Square | FJTS-510007-0 |
| 8 Inch Chuck Table | FJWB-510005-0 |
| DFD6361 / DFD6362 | FKFB-510028-1 (PLS303) |
| DFD636X(210mm without chamfers) | FKFB-510039-1 (PLS203) |
| DFD6360 | FKJB-910001-1 |
| 8 inch DISCO DFD651 | LHLB-910007-1 |
| DFD6340 | LHNB-911186-3(PLS218) |
