Dicing saw table

Dicing saw table

P/N : FJEB-910001-1/ 11H

Industries: Packing of Semiconductor

Equipment serial no: DFD6461 / 6360/6360

Application: Dicing Saw/ Dicing Wafer

Tolerance :.0005~0.008mm

Flatness:0.005~0.008 mm

 

Dicing saw table is mainly used for wafer dicing and laser cutting, flatness accuracy 0.008max, apply wafer 6, 8 and 12 inches, lifetime 18 months (use of acidic ionized water).At present, these products are researched and improved by us and our customers and  also also develop antistatic products for our customers

Antistatic Dicing saw table Resistance: e10^6~9 Ω

This series of antistatic surface treatments is specially developed for the wafer semiconductor industry to reduce the damage caused by static electricity during wafer manufacturing package testing, such as metal, ceramics, plastic (excluding Teflon and tantalum rubber). , quartz, etc., the finished product has high anti-static, high anti-wear, high temperature and other characteristics.

 
Dicing Chuck Table
Category: Vacuum chuck
 P/N : FJEB-910001-1/ 11H 
Industries: Packing of Semiconductor
 Equipment serial no: DFD6461 / 6360/6360A 
Application: Dicing Saw/ Dicing Wafer
 Material: Micro Porous ceramic + SUS420-J 
Grades: AA+ 
Color: Dark yellow 
Tolerance requirements: 0.05mm Flatness: 0.008 mm
 Types of equipment: Dicing Packing 
Gross weight: 10.0kgw 
Net weight: 9.4 kgw 

Item no.

Wafer Dia.
 (inch)

Flatness
(mm)

Net weight
(kgw)

Net/weight
(cm)

Color

CPC-SS-06

6

0.005

1.7

33x33x6

Black

CPC-SS-08

8

0.005

3

33x33x6

Black/Khaki

CPC-SS-12

12

0.008

9.3

45x45x6

Khaki

 

Chuck table design drawing by LONGYI

Standard Procedure for Flat Accuracy Measurement for Disco chuck table

References

Type PN
12 Inch Laser Dicing SawFKFS-510000-0
6 Inch Round Cleaning Chuck AssyFELS-910011-1
8 Inch Round Cleaning Chuck AssyFELS-910012-1
8 Inch Cleaning Chuck Assy for DFD6000FELS-910016-1
12 Inch Cleaning Chuck TableFJES-910007-1
8 Inch Cleaning Chuck Table for DCS1460FJES-910008-1
6 Inch Chuck TableFELS-910013-1
8 Inch Chuck TableFELS-91001501
DAD3220FHEB-910013-1
DAD3350FHEB-910015-1 (PLS200)
DFD636X(220mm with chamfers)FJEB-910002-0 (PLS203)
DFD651FJMB-910006-1
8 inchTSK AWD-200T/DISCO DFD6340FJMB-910008-1 TX28798MR
DFD6340 RoundFJTB-010002-1 (PRS 203)
DFD6340FJTB-010003-0(PRS152)
DFD6340 RectangleFJTB-510005-0 (PRS205X90)
DFD63X SquareFJTS-510007-0
8  Inch Chuck TableFJWB-510005-0
DFD6361 / DFD6362FKFB-510028-1 (PLS303)
DFD636X(210mm without chamfers)FKFB-510039-1 (PLS203)
DFD6360FKJB-910001-1
8 inch DISCO DFD651LHLB-910007-1
DFD6340LHNB-911186-3(PLS218)
Industry

Passive Components, Semiconductor, Others

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