Ceramic Vacuum Chuck
Ceramic Vacuum Chuck is mainly composed of porous ceramic and stainless steel. LONGYI attaches great importance to the selection of frame materials and also focuses on preventing the deformation of materials. Therefore, “stress relief” is an important process and determines the difficulty of processing.
Introduction to the Manufacturing Process:
Stainless Steel:
1. Material Selection
2. Material Cut Shape
3. Stress Relief
4. CNC Machining
5. Deformation Measurement
6. CNC Fine Processing
Porous Ceramic:
1. Material Permeability Measurement
2. Waterjet Cutting Shape
3. Fine Grinding
Combination:
1. Combination Test
2. Glue Selection
3. Frame Material Cleaning
Grinding:
1. Grinding Processing
2. Deformation Measurement
3. Fine Grinding
4. Plane Measurement
